Assignee
SASAZAWA HIDEAKI
JP·3 granted patents·3 pending applications·29 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0190US8547545B2Method and apparatus for inspecting a surface of a substrateSASAZAWA HIDEAKI·Filed 2011·Granted Oct 1, 2013·25 cites·12 claims
- 0269US8411928B2Scatterometry method and device for inspecting patterned mediumSASAZAWA HIDEAKI·Filed 2009·Granted Apr 2, 2013·2 cites·11 claims
- 0366US8638430B2Method for defect determination in fine concave-convex pattern and method for defect determination on patterned mediumSASAZAWA HIDEAKI·Filed 2010·Granted Jan 28, 2014·2 cites·12 claims
- 0448US2008145517A1Method for manufacturing plasma display panel, and apparatus for inspecting plasma display panelSASAZAWA HIDEAKI·Filed 2007·Application pending·0 cites
- 0539US2013077092A1Substrate surface defect inspection method and inspection deviceSASAZAWA HIDEAKI·Filed 2012·Application pending·0 cites
- 0635US2012287426A1Pattern inspection method and device for sameSASAZAWA HIDEAKI·Filed 2011·Application pending·0 cites
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