Assignee
SCHAUER RONALD VERN
US·6 granted patents·22 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0184US8649017B2Methods and apparatus for sensing a substrate in a chamberSCHAUER RONALD VERN·Filed 2012·Granted Feb 11, 2014·5 cites·20 claims
- 0281US8135560B2Sensor system for semiconductor manufacturing apparatusSCHAUER RONALD VERN·Filed 2009·Granted Mar 13, 2012·9 cites·19 claims
- 0367US8539257B2Method and apparatus for detecting an idle mode of processing equipmentSCHAUER RONALD VERN·Filed 2009·Granted Sep 17, 2013·4 cites·22 claims
- 0462US8333939B2High temperature optical sensor device for substrate fabrication equipmentSCHAUER RONALD VERN·Filed 2006·Granted Dec 18, 2012·1 cites·11 claims
- 0561US9243319B2Sensor system for semiconductor manufacturing apparatusSCHAUER RONALD VERN·Filed 2012·Granted Jan 26, 2016·1 cites·17 claims
- 0661US8255606B2Remote access gateway for semiconductor processing equipmentSCHAUER RONALD VERN·Filed 2009·Granted Aug 28, 2012·2 cites·20 claims
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