Assignee
SCHEER STEVEN
US·2 granted patents·20 citations·filing 2007–2009
Top patents by PatentIndex Score
2 records- 0189US8097402B2Using electric-field directed post-exposure bake for double-patterning (D-P)SCHEER STEVEN·Filed 2009·Granted Jan 17, 2012·20 cites·20 claims
- 0246US9383138B2Methods and heat treatment apparatus for uniformly heating a substrate during a bake processSCHEER STEVEN·Filed 2007·Granted Jul 5, 2016·0 cites·16 claims
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