Assignee
SCHLICKER MIKE
DE·2 granted patents·4 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0164US8152595B2System and method for optical endpoint detection during CMP by using an across-substrate signalSCHLICKER MIKE·Filed 2009·Granted Apr 10, 2012·4 cites·24 claims
- 0227US9018023B2Detection of surface defects by optical inline metrology during Cu-CMP processSCHLICKER MIKE·Filed 2011·Granted Apr 28, 2015·0 cites·16 claims
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