Assignee
SCHMIDT KILIAN
DE·4 granted patents·1 pending application·13 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0169US8798778B2Method and system for synchronizing chamber down times by controlling transport sequencing in a process toolSCHMIDT KILIAN·Filed 2009·Granted Aug 5, 2014·4 cites·17 claims
- 0269US8504186B2Method for automatic generation of throughput models for semiconductor toolsSCHMIDT KILIAN·Filed 2012·Granted Aug 6, 2013·3 cites·2 claims
- 0361US8126588B2Method and system for controlling transport sequencing in a process tool by a look-ahead modeSCHMIDT KILIAN·Filed 2008·Granted Feb 28, 2012·3 cites·15 claims
- 0458US8170704B2Method and system for automatic generation of throughput models for semiconductor toolsSCHMIDT KILIAN·Filed 2009·Granted May 1, 2012·3 cites·19 claims
- 0541US2008133041A1Method and system for controlling substrate handling at substrate buffers by interrupting process jobs depending on job prioritySCHMIDT KILIAN·Filed 2007·Application pending·0 cites
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