Assignee
SCHNAPPENBERGER FRANK
DE·3 granted patents·1 pending application·3 citations·filing 2011–2021
Top patents by PatentIndex Score
4 records- 0163US10174415B2Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatusSCHNAPPENBERGER FRANK·Filed 2013·Granted Jan 8, 2019·0 cites·17 claims
- 0262US8623184B2Device for supporting a rotatable target and sputtering apparatusSCHNAPPENBERGER FRANK·Filed 2011·Granted Jan 7, 2014·3 cites·20 claims
- 0346US10818475B2AC power connector, sputtering apparatus and method thereforSCHNAPPENBERGER FRANK·Filed 2013·Granted Oct 27, 2020·0 cites·22 claims
- 0442US2024409350A1Vacuum processing system, apparatus and method for transporting a thin film substrateSCHNAPPENBERGER FRANK·Filed 2021·Application pending·0 cites
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