Assignee
SCHOEN FLORIAN
DE·5 granted patents·9 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0176US8198690B2MEMS devices and methods of manufacture thereofSCHOEN FLORIAN·Filed 2010·Granted Jun 12, 2012·2 cites·13 claims
- 0271US8115573B2Resonance frequency tunable MEMS deviceSCHOEN FLORIAN·Filed 2009·Granted Feb 14, 2012·7 cites·20 claims
- 0355US9266719B2Methods of manufacture MEMS devicesSCHOEN FLORIAN·Filed 2012·Granted Feb 23, 2016·0 cites·22 claims
- 0447US9083308B2MEMS deviceSCHOEN FLORIAN·Filed 2012·Granted Jul 14, 2015·0 cites·19 claims
- 0545US8703516B2MEMS substrates, devices, and methods of manufacture thereofSCHOEN FLORIAN·Filed 2008·Granted Apr 22, 2014·0 cites·28 claims
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