Assignee
SCHUBERT GERHARD
DE·3 granted patents·6 citations·filing 2009–2009
Top patents by PatentIndex Score
3 records- 0166US8267582B2Table guided by aerostatic bearing elements for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Sep 18, 2012·3 cites·10 claims
- 0259US8529130B2Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Sep 10, 2013·2 cites·17 claims
- 0358US8496221B2Aerostatically guided table system for vacuum applicationSCHUBERT GERHARD·Filed 2009·Granted Jul 30, 2013·1 cites·17 claims
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