Assignee
SCHWAB MARKUS
DE·2 granted patents·0 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0151US8542342B2Method of manufacturing a miniaturized deviceSCHWAB MARKUS·Filed 2009·Granted Sep 24, 2013·0 cites·22 claims
- 0238US8537335B2Illumination system for a microlithography projection exposure apparatus, microlithography projection exposure apparatus comprising such an illumination system, and fourier optical systemSCHWAB MARKUS·Filed 2010·Granted Sep 17, 2013·0 cites·26 claims
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