Assignee
SCHWARZL SIEGFRIED
DE·2 granted patents·3 pending applications·9 citations·filing 2004–2011
Top patents by PatentIndex Score
5 records- 0192US8501373B2Passivation of multi-layer mirror for extreme ultraviolet lithographySCHWARZL SIEGFRIED·Filed 2011·Granted Aug 6, 2013·9 cites·20 claims
- 0251US2008204695A1EUV Lithography System and Chuck for Releasing Reticle in a Vacuum Isolated EnvironmentSCHWARZL SIEGFRIED·Filed 2008·Application pending·0 cites
- 0346US8076055B2Passivation of multi-layer mirror for extreme ultraviolet lithographySCHWARZL SIEGFRIED·Filed 2010·Granted Dec 13, 2011·0 cites·9 claims
- 0442US2006024589A1Passivation of multi-layer mirror for extreme ultraviolet lithographySCHWARZL SIEGFRIED·Filed 2004·Application pending·0 cites
- 0540US2008073572A1Systems and methods of measuring power in lithography systemsSCHWARZL SIEGFRIED·Filed 2006·Application pending·0 cites
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