Assignee
SCIVAC
US·3 granted patents·431 citations·filing 1997–1999
Top patents by PatentIndex Score
3 records- 0196US6365010B1Sputtering apparatus and process for high rate coatingsSCIVAC·Filed 1999·Granted Apr 2, 2002·289 cites·60 claims
- 0290US6231732B1Cylindrical carriage sputtering systemSCIVAC·Filed 1997·Granted May 15, 2001·105 cites·42 claims
- 0377US6146509AInverted field circular magnetron sputtering deviceSCIVAC·Filed 1999·Granted Nov 14, 2000·37 cites·26 claims
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