Assignee
SCP GLOBAL TECHNOLOGIES INC
US·10 granted patents·1 pending application·239 citations·filing 1997–2002
Top patents by PatentIndex Score
11 records- 0191US6726848B2Apparatus and method for single substrate processingSCP GLOBAL TECHNOLOGIES INC·Filed 2001·Granted Apr 27, 2004·56 cites·120 claims
- 0279US6379096B1Buffer storage systemSCP GLOBAL TECHNOLOGIES INC·Filed 2000·Granted Apr 30, 2002·35 cites·23 claims
- 0370US6730177B1Method and apparatus for washing and/or drying using a revolved coanda profileSCP GLOBAL TECHNOLOGIES INC·Filed 2001·Granted May 4, 2004·17 cites·30 claims
- 0467US6328809B1Vapor drying system and methodSCP GLOBAL TECHNOLOGIES INC·Filed 1999·Granted Dec 11, 2001·36 cites·74 claims
- 0555US6286688B1Compliant silicon wafer handling systemSCP GLOBAL TECHNOLOGIES INC·Filed 1997·Granted Sep 11, 2001·22 cites·12 claims
- 0654US6264036B1Process cassetteSCP GLOBAL TECHNOLOGIES INC·Filed 1999·Granted Jul 24, 2001·21 cites·20 claims
- 0754US6245250B1Process vesselSCP GLOBAL TECHNOLOGIES INC·Filed 1999·Granted Jun 12, 2001·23 cites·10 claims
- 0848US6170703B1Chemical Dispensing system and methodSCP GLOBAL TECHNOLOGIES INC·Filed 1999·Granted Jan 9, 2001·20 cites·20 claims
- 0937US2004011386A1Composition and method for removing photoresist and/or resist residue using supercritical fluidsSCP GLOBAL TECHNOLOGIES INC·Filed 2002·Application pending·0 cites
- 1036US6843859B1Dump doorSCP GLOBAL TECHNOLOGIES INC·Filed 2002·Granted Jan 18, 2005·0 cites·26 claims
- 1134US6878213B1Process and system for rinsing of semiconductor substratesSCP GLOBAL TECHNOLOGIES INC·Filed 1999·Granted Apr 12, 2005·9 cites·36 claims
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