Assignee
SEKIGUCHI KENJI
JP·3 granted patents·10 citations·filing 2005–2012
Top patents by PatentIndex Score
3 records- 0180US8147617B2Substrate cleaning method and computer readable storage mediumSEKIGUCHI KENJI·Filed 2005·Granted Apr 3, 2012·8 cites·8 claims
- 0266US9111967B2Liquid processing method, liquid processing apparatus and storage mediumSEKIGUCHI KENJI·Filed 2012·Granted Aug 18, 2015·2 cites·20 claims
- 0345US8137478B2Substrate processing method and substrate processing apparatusSEKIGUCHI KENJI·Filed 2010·Granted Mar 20, 2012·0 cites·14 claims
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