Assignee

SEKIGUCHI TOMOKO

JP·1 granted patent·4 citations·filing 2012–2012

Technology mixB82Y1 G01B1 G01N1 G06K1 G06T1 H01J1

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0170US9830524B2Method for estimating shape before shrink and CD-SEM apparatusSEKIGUCHI TOMOKO·Filed 2012·Granted Nov 28, 2017·4 cites·13 claims

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