Assignee
SELTMANN ROLF
DE·2 granted patents·4 citations·filing 2010–2010
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0169US8605250B2Method and system for detecting particle contamination in an immersion lithography toolSELTMANN ROLF·Filed 2010·Granted Dec 10, 2013·2 cites·21 claims
- 0263US8332783B2Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulationsSELTMANN ROLF·Filed 2010·Granted Dec 11, 2012·2 cites·20 claims
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