Assignee
SEMICONDUCTOR 300 GMBH & CO KG
DE·5 granted patents·97 citations·filing 2000–2002
Top patents by PatentIndex Score
5 records- 0188US6419567B1Retaining ring for chemical-mechanical polishing (CMP) head, polishing apparatus, slurry cycle system, and methodSEMICONDUCTOR 300 GMBH & CO KG·Filed 2000·Granted Jul 16, 2002·48 cites·14 claims
- 0282US6633379B2Apparatus and method for measuring the degradation of a toolSEMICONDUCTOR 300 GMBH & CO KG·Filed 2001·Granted Oct 14, 2003·26 cites·24 claims
- 0363US6593242B2Process for planarization and recess etching of integrated circuitsSEMICONDUCTOR 300 GMBH & CO KG·Filed 2002·Granted Jul 15, 2003·12 cites·14 claims
- 0456US6724475B2Apparatus for rapidly measuring angle-dependent diffraction effects on finely patterned surfacesSEMICONDUCTOR 300 GMBH & CO KG·Filed 2001·Granted Apr 20, 2004·8 cites·28 claims
- 0551US6562734B2Method of filling gaps on a semiconductor waferSEMICONDUCTOR 300 GMBH & CO KG·Filed 2001·Granted May 13, 2003·3 cites·7 claims
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