Assignee

SEMICONDUCTOR EQUIPMENT GROUP

US·2 granted patents·108 citations·filing 1997–1998

Technology mixC23C2 C03C1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0185US6022414ASingle body injector and method for delivering gases to a surfaceSEMICONDUCTOR EQUIPMENT GROUP·Filed 1997·Granted Feb 8, 2000·76 cites·17 claims
0256US5976258AHigh temperature substrate transfer moduleSEMICONDUCTOR EQUIPMENT GROUP·Filed 1998·Granted Nov 2, 1999·32 cites·18 claims

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