Assignee

SEMICONDUCTOR EQUIPMENT TECH INC

2 granted patents·43 citations·filing 1998–1998

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2 records

0178USD403334SShield and cover for target of sputter coating apparatusSEMICONDUCTOR EQUIPMENT TECH INC·Filed 1998·Granted Dec 29, 1998·23 cites·1 claims
0274USD403002SShield and cover for target of sputter coating apparatusSEMICONDUCTOR EQUIPMENT TECH INC·Filed 1998·Granted Dec 22, 1998·20 cites·1 claims

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