Assignee

SEMICONDUCTOR EQUIPMENT TECHNO

US·1 granted patent·56 citations·filing 1999–1999

Technology mixB24B1

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0178US6186880B1Recyclable retaining ring assembly for a chemical mechanical polishing apparatusSEMICONDUCTOR EQUIPMENT TECHNO·Filed 1999·Granted Feb 13, 2001·56 cites·17 claims

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