Assignee
SEMICONDUCTOR PROCESS LAB
JP·2 granted patents·460 citations·filing 1992–1992
Top patents by PatentIndex Score
2 records- 0197US5314538AApparatus for manufacturing semiconductor device and method for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB·Filed 1992·Granted May 24, 1994·433 cites·3 claims
- 0255US5324539AMethod for forming CVD thin glass filmsSEMICONDUCTOR PROCESS LAB·Filed 1992·Granted Jun 28, 1994·27 cites·14 claims
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