Assignee

SEMITOOL THERMAL

US·1 granted patent·76 citations·filing 1997–1997

Technology mixC23C1 C30B1 G05D1 H05B1 H10P1

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1 record

0180US5895596AModel based temperature controller for semiconductor thermal processorsSEMITOOL THERMAL·Filed 1997·Granted Apr 20, 1999·76 cites·12 claims

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