Assignee
SEN CORP AN SHI AND AXCELIS CO
JP·7 granted patents·39 citations·filing 2005–2008
Top patents by PatentIndex Score
7 records- 0185US7276711B2Beam space-charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 2, 2007·11 cites·12 claims
- 0280US7315034B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Jan 1, 2008·7 cites·18 claims
- 0379US7304319B2Wafer charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Dec 4, 2007·7 cites·18 claims
- 0474US7423276B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Sep 9, 2008·5 cites·6 claims
- 0570US7791049B2Ion implantation apparatusSEN CORP AN SHI AND AXCELIS CO·Filed 2008·Granted Sep 7, 2010·3 cites·6 claims
- 0669US7687782B2Electrostatic beam deflection scanner and beam deflection scanning methodSEN CORP AN SHI AND AXCELIS CO·Filed 2007·Granted Mar 30, 2010·3 cites·15 claims
- 0767US7597531B2Method of controlling mover deviceSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 6, 2009·3 cites·9 claims
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