Assignee
SEN CORP AN SHI & AXCELIS CO
JP·5 granted patents·45 citations·filing 2005–2008
Top patents by PatentIndex Score
5 records- 0190US7351987B2Irradiation system with ion beamSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Apr 1, 2008·20 cites·13 claims
- 0287US7429743B2Irradiation system ion beam and method to enhance accuracy of irradiationSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Sep 30, 2008·13 cites·44 claims
- 0380US7982192B2Beam processing apparatusSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Jul 19, 2011·6 cites·14 claims
- 0480US7851772B2Ion implantation apparatus and ion implantation methodSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Dec 14, 2010·6 cites·10 claims
- 0539US7411709B2Beam processing system and beam processing methodSEN CORP AN SHI & AXCELIS CO·Filed 2007·Granted Aug 12, 2008·0 cites·26 claims
Join the waitlist — get patent alerts
Get an alert when SEN CORP AN SHI & AXCELIS CO files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →