Assignee
SENTECH INSTR GMBH
DE·3 granted patents·66 citations·filing 1994–2001
Top patents by PatentIndex Score
3 records- 0167US5526117AMethod for the determination of characteristic values of transparent layers with the aid of ellipsometrySENTECH INSTR GMBH·Filed 1994·Granted Jun 11, 1996·33 cites·11 claims
- 0266US6897955B2EllipsometerSENTECH INSTR GMBH·Filed 2001·Granted May 24, 2005·11 cites·45 claims
- 0349US5517128AMethod and arrangement for charge carrier profiling in semiconductor structure by means of AFM scanningSENTECH INSTR GMBH·Filed 1994·Granted May 14, 1996·22 cites·9 claims
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