Assignee
SEXTON GREGORY S
US·4 granted patents·6 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0174US9184043B2Edge electrodes with dielectric coversSEXTON GREGORY S·Filed 2007·Granted Nov 10, 2015·4 cites·11 claims
- 0266US8574397B2Bevel edge plasma chamber with top and bottom edge electrodesSEXTON GREGORY S·Filed 2012·Granted Nov 5, 2013·1 cites·20 claims
- 0365US8252140B2Plasma chamber for wafer bevel edge processingSEXTON GREGORY S·Filed 2011·Granted Aug 28, 2012·1 cites·13 claims
- 0450US8398875B2Method of orienting an upper electrode relative to a lower electrode for bevel edge processingSEXTON GREGORY S·Filed 2011·Granted Mar 19, 2013·0 cites·13 claims
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