Assignee
SEZ SEMICONDUCT EQUIP ZUBEHOER
AT·17 granted patents·991 citations·filing 1994–2000
Top patents by PatentIndex Score
17 records- 0195US6435200B1Device and process for liquid treatment of wafer-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted Aug 20, 2002·149 cites·19 claims
- 0291US5513668ASupport for disk-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1994·Granted May 7, 1996·147 cites·6 claims
- 0389US6383331B1Device for discharging two or more media with media nozzlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted May 7, 2002·38 cites·13 claims
- 0488US5762391AGripper for disk-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1994·Granted Jun 9, 1998·124 cites·13 claims
- 0582US6328846B1Device for an etch treatment of a disk-like objectSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted Dec 11, 2001·44 cites·7 claims
- 0682US6162739AProcess for wet etching of semiconductor wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1999·Granted Dec 19, 2000·76 cites·19 claims
- 0781US6385863B1Process and device for drying disk-like objectsSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted May 14, 2002·30 cites·29 claims
- 0881US6316367B1Process and device for handling disk-like objects, especially silicon wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted Nov 13, 2001·23 cites·3 claims
- 0979US5896877ASupport for wafer-like objectsSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1997·Granted Apr 27, 1999·65 cites·4 claims
- 1076US6056825ARotary chuck including pins for lifting wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted May 2, 2000·42 cites·8 claims
- 1175US6193798B1Arrangement for treatment of wafer-shaped articles, particularly silicon wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted Feb 27, 2001·48 cites·3 claims
- 1272US5931518AGripper for wafer-shaped articlesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted Aug 3, 1999·48 cites·6 claims
- 1369US6056208AApparatus for preventing dripping from conduit openingsSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted May 2, 2000·30 cites·15 claims
- 1467US6627548B1Process for treating semiconductor substratesSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 2000·Granted Sep 30, 2003·18 cites·21 claims
- 1567US5904164AArrangement for treatment of wafer-shaped articles, particularly silicon wafersSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted May 18, 1999·36 cites·8 claims
- 1664US6149759AProcess and device for one-sided treatment of disk-shaped objectsSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1998·Granted Nov 21, 2000·46 cites·7 claims
- 1757US6169038B1Method for rough-etching a semiconductor surfaceSEZ SEMICONDUCT EQUIP ZUBEHOER·Filed 1999·Granted Jan 2, 2001·27 cites·14 claims
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