Assignee
SHANGHAI INST OPTICS & FINE ME
CN·7 granted patents·28 citations·filing 1986–2014
Top patents by PatentIndex Score
7 records- 0176US7739962B2Optical tablesSHANGHAI INST OPTICS & FINE ME·Filed 2006·Granted Jun 22, 2010·10 cites·9 claims
- 0272US9297744B2Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real timeSHANGHAI INST OPTICS & FINE ME·Filed 2014·Granted Mar 29, 2016·3 cites·8 claims
- 0346US4762417AFringe scanning point diffraction interferometer by polarizationSHANGHAI INST OPTICS & FINE ME·Filed 1986·Granted Aug 9, 1988·15 cites·10 claims
- 0444US9267786B2Prism beam expander adjustment apparatus and method for adjusting the sameSHANGHAI INST OPTICS & FINE ME·Filed 2014·Granted Feb 23, 2016·0 cites·18 claims
- 0538US9323052B2Lithography pupil shaping optical system and method for generating off-axis illumination modeSHANGHAI INST OPTICS & FINE ME·Filed 2013·Granted Apr 26, 2016·0 cites·2 claims
- 0637US9036155B2Six-axis four-subdividing interferometerSHANGHAI INST OPTICS & FINE ME·Filed 2014·Granted May 19, 2015·0 cites·6 claims
- 0737US9036154B2Four-axis four-subdividing interferometerSHANGHAI INST OPTICS & FINE ME·Filed 2014·Granted May 19, 2015·0 cites·6 claims
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