Assignee

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD

CN·84 granted patents·10 pending applications·37 citations·filing 2015–2020

Technology mixG03F59 H10P48 H01L40 G02B17 H10W16 G01B11

Top patents by PatentIndex Score

94 records

0184US10268125B2Device and method for detecting overlay errorSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 23, 2019·5 cites·16 claims
0281US10658214B2Wafer processing device and method thereforSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2015·Granted May 19, 2020·3 cites·20 claims
0378US10276417B2Pre-alignment device and method for waferSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 30, 2019·4 cites·9 claims
0476US11551948B2Semiconductor manufacturing apparatusSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jan 10, 2023·2 cites·12 claims
0576US10937151B2Automatic optical inspection methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Mar 2, 2021·1 cites·9 claims
0676US10529610B2Apparatus and method for transferring a substrateSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jan 7, 2020·2 cites·18 claims
0774US10823663B2Measurement device and measurement method for thin film provided with transparent substrateSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Nov 3, 2020·2 cites·17 claims
0874US10651717B2Six-degree-of-freedom linear motorSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2015·Granted May 12, 2020·2 cites·8 claims
0973US10423072B2Exposure apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Sep 24, 2019·3 cites·12 claims
1070US10983448B2Objective lens protection device, objective lens system and lithographic deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·24 claims
1170US10908497B2Mask boxSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Feb 2, 2021·1 cites·15 claims
1270US10788716B2Light alignment control method and light alignment deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Sep 29, 2020·1 cites·21 claims
1369US10648926B2Method of detecting particles on panelSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted May 12, 2020·1 cites·8 claims
1467US10907952B2Optical measurement device and method with improved measurement precisionSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Feb 2, 2021·1 cites·20 claims
1566US11309209B2Wafer holder and wafer transfer apparatus, system and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Apr 19, 2022·1 cites·29 claims
1666US10942458B2Exposure system, exposure device and exposure methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Mar 9, 2021·1 cites·21 claims
1766US10658327B1Chip bonding apparatus and bonding methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted May 19, 2020·1 cites·11 claims
1865US10748800B2Chip bonding apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO LTD·Filed 2017·Granted Aug 18, 2020·1 cites·17 claims
1962US11383940B2Robot arm for holding cassette and automatic cassette transfer deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jul 12, 2022·1 cites·13 claims
2062US10254661B2Silicon wafer transportation systemSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 9, 2019·1 cites·7 claims
2160US10539887B2Lens contamination prevention device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jan 21, 2020·1 cites·10 claims
2256US10712668B2Shutter device used for exposure in lithography machine, and method for use thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jul 14, 2020·1 cites·14 claims
2350US12163814B2Displacement measuring apparatus, displacement measuring method and photolithography deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2020·Granted Dec 10, 2024·0 cites·25 claims
2450US10747100B2Pattern structure and exposure method of patterned sapphire substrate maskSHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO LTD·Filed 2017·Granted Aug 18, 2020·0 cites·7 claims
2545US11042099B2Photoetching apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jun 22, 2021·0 cites·22 claims
2644US11469121B2Spin coating device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Oct 11, 2022·0 cites·9 claims
2744US10345247B2Apparatus for detecting degree of particulate contamination on flat panelSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jul 9, 2019·0 cites·11 claims
2843US11106143B2Mask fork for transferring mask, and corresponding mask box and mask transferring methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Aug 31, 2021·0 cites·14 claims
2943US10571245B2Grating measurement apparatusSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Feb 25, 2020·0 cites·18 claims
3042US11042101B2Vertical control method for use in lithography machineSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jun 22, 2021·0 cites·20 claims
3142US10983415B2Shutter device, method of controlling same, photolithography machine, and method of controlling exposure dose thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Apr 20, 2021·0 cites·17 claims
3242US10691025B2Reaction force diversion mechanism, motor device and photolithography machineSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jun 23, 2020·0 cites·12 claims
3342US2020356014A1Mask transfer system and transfer methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Application pending·0 cites
3441US11326685B2Linear module and operating method thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted May 10, 2022·0 cites·13 claims
3541US10942063B2Apparatus and method for measuring amplitude of scanning reflectorSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·10 claims
3641US10921719B2Optical measurement device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Feb 16, 2021·0 cites·15 claims
3741US10763235B2Batch bonding apparatus and bonding methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Sep 1, 2020·0 cites·12 claims
3841US2020363146A1Heat exchange apparatus, and heat exchange method therefor and vapour deposition device thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Application pending·0 cites
3940US11037900B2Chip bonding device and bonding method thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jun 15, 2021·0 cites·19 claims
4040US2019154948A1Side vertical mirror group and installation method thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Application pending·0 cites
4139US11899181B2Lithography projection objectiveSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2019·Granted Feb 13, 2024·0 cites·15 claims
4239US10928704B2Shutter deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Feb 23, 2021·0 cites·9 claims
4339US10809059B2Focusing and leveling deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Oct 20, 2020·0 cites·6 claims
4439US10393507B2Interferometer measurement device and control method thereforSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Aug 27, 2019·0 cites·8 claims
4539US10359712B2Relative position measurement based alignment system, double workpiece stage system and measurement systemSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Jul 23, 2019·0 cites·17 claims
4639US2020149792A1Liquid temperature-control apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Application pending·0 cites
4738US10895814B2Shifting-in/out mechanism, and shifting-in/out device used for workpiece table of photoetching machineSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jan 19, 2021·0 cites·17 claims
4838US10770320B2Universal chip batch-bonding apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Sep 8, 2020·0 cites·12 claims
4938US10642163B2System and method for controlling exposure dose of light sourceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted May 5, 2020·0 cites·8 claims
5038US10345720B2Photolithography tool and method for compensating for surface deformation in carrier of photolithography toolSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jul 9, 2019·0 cites·10 claims

Showing the top 50 of 94 patent records by PatentIndex Score.

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