Individual holder
SHEA KEVIN R
US·4 granted patents·1 pending application·9 citations·filing 2004–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0183US8076248B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialSHEA KEVIN R·Filed 2010·Granted Dec 13, 2011·4 cites·9 claims
- 0277US8440525B2Method for obtaining extreme selectivity of metal nitrides and metal oxidesSHEA KEVIN R·Filed 2012·Granted May 14, 2013·2 cites·9 claims
- 0376US8470716B2Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive materialSHEA KEVIN R·Filed 2011·Granted Jun 25, 2013·2 cites·21 claims
- 0462US8119537B2Selective etching of oxides to metal nitrides and metal oxidesSHEA KEVIN R·Filed 2005·Granted Feb 21, 2012·1 cites·10 claims
- 0539US2006011586A1Method of etching nitridesSHEA KEVIN R·Filed 2004·Application pending·0 cites
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