Assignee
SHERO ERIC
US·3 granted patents·1,156 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0198US8883270B2Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen speciesSHERO ERIC·Filed 2010·Granted Nov 11, 2014·544 cites·22 claims
- 0297US9394608B2Semiconductor processing reactor and components thereofSHERO ERIC·Filed 2010·Granted Jul 19, 2016·506 cites·15 claims
- 0395US8293658B2Reactive site deactivation against vapor depositionSHERO ERIC·Filed 2010·Granted Oct 23, 2012·106 cites·40 claims
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