Assignee
SHIGENOBU ATSUSHI
JP·2 granted patents·1 citations·filing 2009–2010
Top patents by PatentIndex Score
2 records- 0159US8634061B2Exposure apparatus and device manufacturing methodSHIGENOBU ATSUSHI·Filed 2010·Granted Jan 21, 2014·1 cites·11 claims
- 0242US8564758B2Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection systemSHIGENOBU ATSUSHI·Filed 2009·Granted Oct 22, 2013·0 cites·12 claims
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