Assignee
SHIH CHI-YUAN
US·3 granted patents·17 citations·filing 2006–2011
Top patents by PatentIndex Score
3 records- 0187US8592287B2Overlay alignment mark and method of detecting overlay alignment error using the markSHIH CHI-YUAN·Filed 2011·Granted Nov 26, 2013·7 cites·13 claims
- 0283US8183701B2Structure of stacking scatterometry based overlay marks for marks footprint reductionSHIH CHI-YUAN·Filed 2009·Granted May 22, 2012·7 cites·13 claims
- 0371US8574432B2Integrated chromatography devices and systems for monitoring analytes in real time and methods for manufacturing the sameSHIH CHI-YUAN·Filed 2006·Granted Nov 5, 2013·3 cites·20 claims
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