Assignee
SHIN ETSU HANDOTAI LTD
US·3 granted patents·31 citations·filing 1997–1999
Top patents by PatentIndex Score
3 records- 0155US6254933B1Method of chemical vapor depositionSHIN ETSU HANDOTAI LTD·Filed 1999·Granted Jul 3, 2001·11 cites·10 claims
- 0250US5964941ACrystal pulling method and apparatusSHIN ETSU HANDOTAI LTD·Filed 1997·Granted Oct 12, 1999·13 cites·9 claims
- 0337US5970365ASilicon wafer including amorphous silicon layer formed by PCVD and method of manufacturing waferSHIN ETSU HANDOTAI LTD·Filed 1997·Granted Oct 19, 1999·7 cites·5 claims
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