Assignee
SHINDO TAKEHIRO
JP·6 granted patents·21 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0184US8135486B2Substrate position determining method and substrate position detecting methodSHINDO TAKEHIRO·Filed 2007·Granted Mar 13, 2012·9 cites·21 claims
- 0281US8216382B2Foreign matter removal method and storage mediumSHINDO TAKEHIRO·Filed 2009·Granted Jul 10, 2012·8 cites·9 claims
- 0371US8159653B2Substrate position detection apparatus, and method of adjusting a position of an imaging component of the sameSHINDO TAKEHIRO·Filed 2008·Granted Apr 17, 2012·4 cites·8 claims
- 0457US8113487B2Vacuum processing apparatusSHINDO TAKEHIRO·Filed 2009·Granted Feb 14, 2012·0 cites·4 claims
- 0553US8523138B2Vacuum processing apparatusSHINDO TAKEHIRO·Filed 2012·Granted Sep 3, 2013·0 cites·4 claims
- 0649US9082798B2Substrate collecting methodSHINDO TAKEHIRO·Filed 2012·Granted Jul 14, 2015·0 cites·3 claims
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