Assignee
SHIOTA YUKI
JP·3 granted patents·6 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0177US8252488B2Mask blank substrate manufacturing method, and reflective mask blank manufacturing methodSHIOTA YUKI·Filed 2009·Granted Aug 28, 2012·6 cites·9 claims
- 0256US8486588B2Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive filmSHIOTA YUKI·Filed 2011·Granted Jul 16, 2013·0 cites·15 claims
- 0355US8110323B2Optically semitransmissive film, photomask blank and photomask, and method for designing optically semitransmissive filmSHIOTA YUKI·Filed 2011·Granted Feb 7, 2012·0 cites·24 claims
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