Assignee
SHIRAISHI MASAYUKI
JP·5 granted patents·2 pending applications·8 citations·filing 2008–2010
Top patents by PatentIndex Score
7 records- 0168US8421998B2Optical system, exposure apparatus, and method of manufacturing electronic deviceSHIRAISHI MASAYUKI·Filed 2009·Granted Apr 16, 2013·4 cites·63 claims
- 0264US8945802B2Flare-measuring mask, flare-measuring method, and exposure methodSHIRAISHI MASAYUKI·Filed 2009·Granted Feb 3, 2015·1 cites·17 claims
- 0360US9030645B2Illumination optical system, exposure apparatus, and exposure methodSHIRAISHI MASAYUKI·Filed 2009·Granted May 12, 2015·1 cites·46 claims
- 0457US8194322B2Multilayer-film reflective mirror, exposure apparatus, device manufacturing method, and manufacturing method of multilayer-film reflective mirrorSHIRAISHI MASAYUKI·Filed 2008·Granted Jun 5, 2012·2 cites·19 claims
- 0554US8699014B2Measuring member, sensor, measuring method, exposure apparatus, exposure method, and device producing methodSHIRAISHI MASAYUKI·Filed 2009·Granted Apr 15, 2014·0 cites·40 claims
- 0643US2010033704A1Deformable mirror, mirror apparatus, and exposure apparatusSHIRAISHI MASAYUKI·Filed 2009·Application pending·0 cites
- 0737US2011001945A1Projection optical system, exposure apparatus, and assembly method thereofSHIRAISHI MASAYUKI·Filed 2010·Application pending·0 cites
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