Assignee
SHIRAKO KENJI
JP·1 granted patent·1 pending application·2 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0163US9222732B2Substrate processing apparatus and method of manufacturing semiconductor deviceSHIRAKO KENJI·Filed 2011·Granted Dec 29, 2015·2 cites·15 claims
- 0232US2012156886A1Substrate processing apparatus, method of manufacturing substrate, and method of manufacturing semiconductor deviceSHIRAKO KENJI·Filed 2011·Application pending·0 cites
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