Assignee
SHIRASU HIROSHI
JP·2 granted patents·2 citations·filing 2007–2012
Top patents by PatentIndex Score
2 records- 0163US8704431B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2012·Granted Apr 22, 2014·1 cites·11 claims
- 0254US8531093B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2007·Granted Sep 10, 2013·1 cites·23 claims
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