Assignee
SHIRATA YOSUKE
JP·3 granted patents·4 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0165US8243254B2Exposing method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2008·Granted Aug 14, 2012·2 cites·53 claims
- 0264US9025126B2Exposure apparatus adjusting method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2008·Granted May 5, 2015·2 cites·34 claims
- 0351US8547520B2Exposing method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2012·Granted Oct 1, 2013·0 cites·51 claims
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