Assignee
SHIRLEY PAUL D
US·1 granted patent·5 pending applications·10 citations·filing 2006–2009
Technology mixG03F6
Top patents by PatentIndex Score
6 records- 0185US8124326B2Methods of patterning positive photoresistSHIRLEY PAUL D·Filed 2009·Granted Feb 28, 2012·10 cites·33 claims
- 0251US2007056513A1System for situ photoresist thickness characterizatonSHIRLEY PAUL D·Filed 2006·Application pending·0 cites
- 0351US2007065575A1Method for in situ photoresist thickness characterizationSHIRLEY PAUL D·Filed 2006·Application pending·0 cites
- 0451US2007061035A1Method and computer-readable medium for in situ photoresist thickness characterizationSHIRLEY PAUL D·Filed 2006·Application pending·0 cites
- 0551US2007026134A1Method for in situ photoresist thickness characterizationSHIRLEY PAUL D·Filed 2006·Application pending·0 cites
- 0647US2006263514A1Device and method for forming improved resist layerSHIRLEY PAUL D·Filed 2006·Application pending·0 cites
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