Assignee
SHISHIDO CHIE
JP·5 granted patents·20 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0190US8110800B2Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the systemSHISHIDO CHIE·Filed 2009·Granted Feb 7, 2012·10 cites·20 claims
- 0286US8481936B2Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the systemSHISHIDO CHIE·Filed 2012·Granted Jul 9, 2013·4 cites·16 claims
- 0378US9671223B2Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over timeSHISHIDO CHIE·Filed 2011·Granted Jun 6, 2017·4 cites·8 claims
- 0465US8207512B2Charged particle beam apparatus and methods for capturing images using the sameSHISHIDO CHIE·Filed 2010·Granted Jun 26, 2012·1 cites·8 claims
- 0563US9354049B2Shape measurement method, and system thereforSHISHIDO CHIE·Filed 2011·Granted May 31, 2016·1 cites·8 claims
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