Assignee
SHMAREV YEVGENIY KONSTANTINOVICH
US·3 granted patents·8 citations·filing 2006–2018
Top patents by PatentIndex Score
3 records- 0175US8189203B2Reticle inspection systems and methodSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2009·Granted May 29, 2012·7 cites·20 claims
- 0261US8934084B2System and method for printing interference patterns having a pitch in a lithography systemSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2006·Granted Jan 13, 2015·1 cites·20 claims
- 0352US10866526B2Metrology method and deviceSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2018·Granted Dec 15, 2020·0 cites·22 claims
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