Assignee
SHRINIVASAN KRISHNAN
IN·3 granted patents·70 citations·filing 2007–2013
Top patents by PatentIndex Score
3 records- 0195US8629068B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2013·Granted Jan 14, 2014·25 cites·3 claims
- 0295US8454750B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2007·Granted Jun 4, 2013·37 cites·22 claims
- 0388US8951348B1Single-chamber sequential curing of semiconductor wafersSHRINIVASAN KRISHNAN·Filed 2012·Granted Feb 10, 2015·8 cites·20 claims
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