Assignee
SILICON LIGHT MACHINES CORP
US·102 granted patents·16 pending applications·1,551 citations·filing 2000–2025
Top patents by PatentIndex Score
118 records- 0198US7247832B2Signal processing circuit and method using analog voltage signal to pulse width modulation conversionSILICON LIGHT MACHINES CORP·Filed 2005·Granted Jul 24, 2007·92 cites·14 claims
- 0297US7138620B2Two-dimensional motion sensorSILICON LIGHT MACHINES CORP·Filed 2005·Granted Nov 21, 2006·61 cites·15 claims
- 0396US7027204B2High-density spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2004·Granted Apr 11, 2006·99 cites·21 claims
- 0496US6956878B1Method and apparatus for reducing laser speckle using polarization averagingSILICON LIGHT MACHINES CORP·Filed 2000·Granted Oct 18, 2005·89 cites·33 claims
- 0595US11016287B2High étendue spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2018·Granted May 25, 2021·9 cites·14 claims
- 0695US7986603B1Spatial light modulator for holographic data storageSILICON LIGHT MACHINES CORP·Filed 2008·Granted Jul 26, 2011·21 cites·14 claims
- 0795US7297912B1Circuit and method for reducing power consumption in an optical navigation system having redundant arraysSILICON LIGHT MACHINES CORP·Filed 2006·Granted Nov 20, 2007·38 cites·20 claims
- 0895US7049164B2Microelectronic mechanical system and methodsSILICON LIGHT MACHINES CORP·Filed 2002·Granted May 23, 2006·98 cites·20 claims
- 0995US7027202B1Silicon substrate as a light modulator sacrificial layerSILICON LIGHT MACHINES CORP·Filed 2003·Granted Apr 11, 2006·83 cites·13 claims
- 1093US7268341B2Optical position sensing device including interlaced groups of photosensitive elementsSILICON LIGHT MACHINES CORP·Filed 2005·Granted Sep 11, 2007·25 cites·20 claims
- 1193US7042575B2Speckle sizing and sensor dimensions in optical positioning deviceSILICON LIGHT MACHINES CORP·Filed 2005·Granted May 9, 2006·34 cites·20 claims
- 1293US6872984B1Method of sealing a hermetic lid to a semiconductor die at an angleSILICON LIGHT MACHINES CORP·Filed 2002·Granted Mar 29, 2005·68 cites·8 claims
- 1392US7227687B1Complex spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2005·Granted Jun 5, 2007·29 cites·10 claims
- 1492US7183637B2Microelectronic mechanical system and methodsSILICON LIGHT MACHINES CORP·Filed 2005·Granted Feb 27, 2007·21 cites·11 claims
- 1591US7248345B2Signal processing method for use with an optical navigation systemSILICON LIGHT MACHINES CORP·Filed 2005·Granted Jul 24, 2007·31 cites·14 claims
- 1690US7177081B2High contrast grating light valve type deviceSILICON LIGHT MACHINES CORP·Filed 2001·Granted Feb 13, 2007·44 cites·10 claims
- 1790US7064883B2Two dimensional spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2004·Granted Jun 20, 2006·43 cites·23 claims
- 1889US7573631B1Hybrid analog/digital spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2006·Granted Aug 11, 2009·21 cites·14 claims
- 1988US10665182B1Efficient data transmission in analog spatial light modulatorsSILICON LIGHT MACHINES CORP·Filed 2019·Granted May 26, 2020·5 cites·19 claims
- 2088US7250893B2Signal processing circuit and method for use with an optical navigation systemSILICON LIGHT MACHINES CORP·Filed 2005·Granted Jul 31, 2007·20 cites·20 claims
- 2188US6956995B1Optical communication arrangementSILICON LIGHT MACHINES CORP·Filed 2002·Granted Oct 18, 2005·45 cites·26 claims
- 2287US6876475B1Dual modulator wavelength-selective switch and equalizerSILICON LIGHT MACHINES CORP·Filed 2003·Granted Apr 5, 2005·24 cites·17 claims
- 2386US12504695B2MEMS based spatial light modulators and applicationsSILICON LIGHT MACHINES CORP·Filed 2024·Granted Dec 23, 2025·0 cites·17 claims
- 2486US7285766B2Optical positioning device having shaped illuminationSILICON LIGHT MACHINES CORP·Filed 2005·Granted Oct 23, 2007·9 cites·14 claims
- 2586US7277110B2Laser-based thermal printerSILICON LIGHT MACHINES CORP·Filed 2005·Granted Oct 2, 2007·9 cites·12 claims
- 2686US6930364B2Microelectronic mechanical system and methodsSILICON LIGHT MACHINES CORP·Filed 2001·Granted Aug 16, 2005·34 cites·4 claims
- 2785US6991953B1Microelectronic mechanical system and methodsSILICON LIGHT MACHINES CORP·Filed 2002·Granted Jan 31, 2006·29 cites·15 claims
- 2882US7529017B1Circuit and method for snapdown prevention in voltage controlled MEMS devicesSILICON LIGHT MACHINES CORP·Filed 2006·Granted May 5, 2009·10 cites·20 claims
- 2982US7057819B1High contrast tilting ribbon blazed gratingSILICON LIGHT MACHINES CORP·Filed 2002·Granted Jun 6, 2006·24 cites·16 claims
- 3082US6947613B1Wavelength selective switch and equalizerSILICON LIGHT MACHINES CORP·Filed 2003·Granted Sep 20, 2005·24 cites·20 claims
- 3181US6922272B1Method and apparatus for leveling thermal stress variations in multi-layer MEMS devicesSILICON LIGHT MACHINES CORP·Filed 2003·Granted Jul 26, 2005·25 cites·18 claims
- 3281US6839479B2Optical switchSILICON LIGHT MACHINES CORP·Filed 2002·Granted Jan 4, 2005·24 cites·23 claims
- 3380US9395531B2Driver for MEMS spatial light modulatorSILICON LIGHT MACHINES CORP·Filed 2013·Granted Jul 19, 2016·3 cites·14 claims
- 3479US10746983B2Spatial light modulators for phased-array applicationsSILICON LIGHT MACHINES CORP·Filed 2018·Granted Aug 18, 2020·2 cites·8 claims
- 3579US7298460B2Method for determining motion using a velocity predictorSILICON LIGHT MACHINES CORP·Filed 2006·Granted Nov 20, 2007·10 cites·17 claims
- 3679US7215461B1MEMS devices with increased damping for suspended movable structuresSILICON LIGHT MACHINES CORP·Filed 2005·Granted May 8, 2007·9 cites·20 claims
- 3778US12405534B2MEMs based spatial light modulators with improved thermal controlSILICON LIGHT MACHINES CORP·Filed 2022·Granted Sep 2, 2025·0 cites·19 claims
- 3878US12181657B2Reflective two-dimensional spatial light modulatorsSILICON LIGHT MACHINES CORP·Filed 2022·Granted Dec 31, 2024·0 cites·19 claims
- 3977US11933962B2MEMS based spatial light modulators and applicationsSILICON LIGHT MACHINES CORP·Filed 2022·Granted Mar 19, 2024·0 cites·19 claims
- 4077US7359106B1Diffractive light modulator having continuously deformable surfaceSILICON LIGHT MACHINES CORP·Filed 2005·Granted Apr 15, 2008·8 cites·14 claims
- 4177US2025026633A1Dual-Layer Micro-ribbon MEMS Light ModulatorSILICON LIGHT MACHINES CORP·Filed 2024·Application pending·0 cites
- 4276US6958818B1Fabry-Perot interferometer including membrane supported reflectorSILICON LIGHT MACHINES CORP·Filed 2002·Granted Oct 25, 2005·18 cites·20 claims
- 4376US6865346B1Fiber optic transceiverSILICON LIGHT MACHINES CORP·Filed 2001·Granted Mar 8, 2005·18 cites·23 claims
- 4476US2025326629A1Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type ModulatorsSILICON LIGHT MACHINES CORP·Filed 2025·Application pending·0 cites
- 4576US2025304432A1Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional ModulatorsSILICON LIGHT MACHINES CORP·Filed 2025·Application pending·0 cites
- 4675US7288424B2Integrated driver process flowSILICON LIGHT MACHINES CORP·Filed 2003·Granted Oct 30, 2007·13 cites·11 claims
- 4775US6932957B2Method and apparatus for increasing bulk conductivity of a ferroelectric materialSILICON LIGHT MACHINES CORP·Filed 2002·Granted Aug 23, 2005·11 cites·12 claims
- 4875US6934070B1Chirped optical MEM deviceSILICON LIGHT MACHINES CORP·Filed 2002·Granted Aug 23, 2005·19 cites·29 claims
- 4974US11958738B2Dual-layer micro-ribbon MEMS light modulatorSILICON LIGHT MACHINES CORP·Filed 2022·Granted Apr 16, 2024·0 cites·21 claims
- 5074US7466022B2Wafer-level seal for non-silicon-based devicesSILICON LIGHT MACHINES CORP·Filed 2005·Granted Dec 16, 2008·6 cites·10 claims
Showing the top 50 of 118 patent records by PatentIndex Score.
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