Assignee

SILICON WAFER TECHNOLOGIES

US·2 granted patents·79 citations·filing 2000–2002

Technology mixB81C1 G01P1 H10P1 H10W1

Top patents by PatentIndex Score

2 records

0188US6344417B1Method for micro-mechanical structuresSILICON WAFER TECHNOLOGIES·Filed 2000·Granted Feb 5, 2002·52 cites·22 claims
0277US6995075B1Process for forming a fragile layer inside of a single crystalline substrateSILICON WAFER TECHNOLOGIES·Filed 2002·Granted Feb 7, 2006·27 cites·19 claims

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