Assignee
SINGH HARMEET
US·9 granted patents·1 pending application·800 citations·filing 2009–2013
Top patents by PatentIndex Score
10 records- 0199US8617411B2Methods and apparatus for atomic layer etchingSINGH HARMEET·Filed 2011·Granted Dec 31, 2013·574 cites·19 claims
- 0298US8637794B2Heating plate with planar heating zones for semiconductor processingSINGH HARMEET·Filed 2009·Granted Jan 28, 2014·86 cites·15 claims
- 0398US8546732B2Heating plate with planar heater zones for semiconductor processingSINGH HARMEET·Filed 2010·Granted Oct 1, 2013·75 cites·12 claims
- 0497US8791392B2Methods of fault detection for multiplexed heater arraySINGH HARMEET·Filed 2010·Granted Jul 29, 2014·35 cites·13 claims
- 0591US8520360B2Electrostatic chuck with wafer backside plasma assisted dechuckSINGH HARMEET·Filed 2011·Granted Aug 27, 2013·11 cites·19 claims
- 0688US10014192B2Apparatus for atomic layering etchingSINGH HARMEET·Filed 2013·Granted Jul 3, 2018·7 cites·22 claims
- 0781US9349621B2Vacuum seal arrangement useful in plasma processing chamberSINGH HARMEET·Filed 2011·Granted May 24, 2016·5 cites·9 claims
- 0880US10388493B2Component of a substrate support assembly producing localized magnetic fieldsSINGH HARMEET·Filed 2011·Granted Aug 20, 2019·4 cites·20 claims
- 0971US8525139B2Method and apparatus of halogen removalSINGH HARMEET·Filed 2010·Granted Sep 3, 2013·3 cites·20 claims
- 1041US2012278735A1Communication device for generating a conference provisioning data setSINGH HARMEET·Filed 2011·Application pending·0 cites
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