Assignee
SINGH SARAVJEET
US·4 granted patents·31 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0194US9287093B2Dynamic ion radical sieve and ion radical aperture for an inductively coupled plasma (ICP) reactorSINGH SARAVJEET·Filed 2012·Granted Mar 15, 2016·19 cites·16 claims
- 0283US9305810B2Method and apparatus for fast gas exchange, fast gas switching, and programmable gas deliverySINGH SARAVJEET·Filed 2012·Granted Apr 5, 2016·6 cites·19 claims
- 0380US10170277B2Apparatus and methods for dry etch with edge, side and back protectionSINGH SARAVJEET·Filed 2012·Granted Jan 1, 2019·4 cites·17 claims
- 0471US8912077B2Hybrid laser and plasma etch wafer dicing using substrate carrierSINGH SARAVJEET·Filed 2011·Granted Dec 16, 2014·2 cites·19 claims
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