Assignee
SINGULUS TECHNOLOGIES AG
DE·8 granted patents·181 citations·filing 1997–2005
Top patents by PatentIndex Score
8 records- 0181US6344114B1Magnetron sputtering cathode with magnet disposed between two yoke platesSINGULUS TECHNOLOGIES AG·Filed 1997·Granted Feb 5, 2002·39 cites·40 claims
- 0273US7520954B2Method and apparatus for separating disc-shaped substratesSINGULUS TECHNOLOGIES AG·Filed 2005·Granted Apr 21, 2009·3 cites·6 claims
- 0370US6338781B1Magnetron sputtering cathode with magnet disposed between two yoke platesSINGULUS TECHNOLOGIES AG·Filed 1997·Granted Jan 15, 2002·35 cites·33 claims
- 0470US6261403B1Method for preventing bubbles or small bubbles when connecting substrate parts of optical data carriers by means of an adhesiveSINGULUS TECHNOLOGIES AG·Filed 1999·Granted Jul 17, 2001·28 cites·26 claims
- 0569US7799179B2Sputtering cathode and device and method for coating a substrate with several layersSINGULUS TECHNOLOGIES AG·Filed 2003·Granted Sep 21, 2010·17 cites·19 claims
- 0658US6814825B2Method and device for controlling thickness during spin coatingSINGULUS TECHNOLOGIES AG·Filed 1998·Granted Nov 9, 2004·21 cites·9 claims
- 0757US6368435B1Device and method for transporting separate substratesSINGULUS TECHNOLOGIES AG·Filed 1998·Granted Apr 9, 2002·22 cites·20 claims
- 0852US6096180ACathodic sputtering deviceSINGULUS TECHNOLOGIES AG·Filed 1997·Granted Aug 1, 2000·16 cites·50 claims
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