Assignee
SMILDE HENDRIK JAN HIDDE
NL·5 granted patents·1 pending application·173 citations·filing 2009–2011
Top patents by PatentIndex Score
6 records- 0198US8867020B2Metrology method and apparatus, and device manufacturing methodSMILDE HENDRIK JAN HIDDE·Filed 2011·Granted Oct 21, 2014·59 cites·14 claims
- 0298US8411287B2Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrateSMILDE HENDRIK JAN HIDDE·Filed 2010·Granted Apr 2, 2013·85 cites·33 claims
- 0397US9140998B2Metrology method and inspection apparatus, lithographic system and device manufacturing methodSMILDE HENDRIK JAN HIDDE·Filed 2011·Granted Sep 22, 2015·24 cites·12 claims
- 0483US8223347B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodSMILDE HENDRIK JAN HIDDE·Filed 2010·Granted Jul 17, 2012·4 cites·7 claims
- 0556US9081304B2Substrate, an inspection apparatus, and a lithographic apparatusSMILDE HENDRIK JAN HIDDE·Filed 2009·Granted Jul 14, 2015·1 cites·14 claims
- 0640US2012044470A1Substrate for Use in Metrology, Metrology Method and Device Manufacturing MethodSMILDE HENDRIK JAN HIDDE·Filed 2011·Application pending·0 cites
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