Assignee
SMITH BRUCE W
6 granted patents·1 pending application·79 citations·filing 2003–2007
Top patents by PatentIndex Score
7 records- 0193US7136143B2Method for aberration detection and measurementSMITH BRUCE W·Filed 2003·Granted Nov 14, 2006·42 cites·22 claims
- 0285US7233887B2Method of photomask correction and its optimization using localized frequency analysisSMITH BRUCE W·Filed 2003·Granted Jun 19, 2007·26 cites·21 claims
- 0379US7345735B2Apparatus for aberration detection and measurementSMITH BRUCE W·Filed 2006·Granted Mar 18, 2008·4 cites·17 claims
- 0468US7768648B2Method for aberration evaluation in a projection systemSMITH BRUCE W·Filed 2006·Granted Aug 3, 2010·2 cites·26 claims
- 0559US7170588B2Reduction Smith-Talbot interferometer prism for micropatterningSMITH BRUCE W·Filed 2004·Granted Jan 30, 2007·5 cites·25 claims
- 0644US8852850B2Method of photolithography using a fluid and a system thereofSMITH BRUCE W·Filed 2005·Granted Oct 7, 2014·0 cites·40 claims
- 0744US2007172745A1Evanescent wave assist features for microlithographySMITH BRUCE W·Filed 2007·Application pending·0 cites
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